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MEMS Flow Sensor
D6F-01/02/05
High Accuracy Mass Flow Sensing
? Small size
? Fast response
? Applicable to air, non-corrosive gas, natural gas
? Applications include: medical respiratory equipment,
analysis apparatus, combustion control
Ordering Information
Case
PPS
Gas
Air*
Flow range
0-1L/min
Notes
Integral orifice
Model
D6F-01A1-110
0-2L/min
D6F-02A1-110
Aluminum
LNG* (13A)
0-5L/min
—
D6F-05N2-000
Ratings
■ Absolute Maximum Rating
Item
Power supply
Output voltage
Symbol
V CC
V OUT
Rating
26.4
6
Unit
VDC
VDC
■ Recommendation Condition
Item
Power supply
Operating temperature
Symbol
V CC
T ORR
Condition
—
—
Min.
10.8
-10
Typ.
—
—
Max.
26.4
60
Unit
VDC
°C
Output voltage (max.)
Output voltage (min.)
V OH
V OL
V CC = 12 to 24 VDC I OH = 5 mA 5
V CC = 12 to 24 VDC I OH = 5mA 0
—
—
5.7
1
VDC
VDC
MEMS Flow Sensor
D6F-01/02/05
1
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